@Misc{refodat_mods_00000036,
  author = 	{Brasil, Davi Anders
		and Hesse, Steffen
		and Katzschmann, Michael
		and Herzog, Ludwig
		and Fr{\"o}hlich, Thomas
		and Kissinger, Thomas},
  title = 	{Investigation of distance measurement reproducibility for a long-range nanopositioning machine combined with a laser focus sensor},
  year = 	{2025},
  month = 	{Apr},
  day = 	{28},
  keywords = 	{nanopositioning in large travel range; nanometrology; multi-coordinate direct drive; laser focus sensor for lateral measurements; Ilmenau},
  abstract = 	{This dataset consists of the measurement reproducibility of a nanopositioning machine equipped with a laser focus sensor (LFS). The highlights of the results are: high precision positioning repeatability using planar direct drive and pneumatic lift units, the combination of nanopositioning machine and LFS brings dimensional measurements close to sub-10 nm performance over a large range, the effect of a design without a metrology frame. The system operates within a volume of {\O}200 mm x 25 mm and implements 6-DOF positioning control based on direct magnetic drives, differential laser interferometers and an autocollimator. The integrated LFS makes it suitable for a wide range of applications. Experimental evaluations showed remarkable reproducibility results in long-range distance measurements, with standard deviation values below 15 nm over a range of 155 mm. This work was presented at the 20th International Conference on Precision Engineering (ICPE2024) in Sendai on 26 October 2024. https://web.tohoku.ac.jp/nanometrology/icpe2024/indexHomepage.html},
  doi = 	{10.71758/refodat.36},
  url = 	{https://refodat.de/receive/refodat_mods_00000036},
  url = 	{https://doi.org/10.71758/refodat.36},
  file = 	{:https://refodat.de/servlets/MCRZipServlet/refodat_derivate_00000019:TYPE},
  language = 	{en}
}