In-situ referencing of the absolute angles of mirrors origin in a 6-DOF nanopositioning stage.

This dataset contains in-situ angular measurements of reference mirrors in a six-degree-of-freedom (6-DOF) nanopositioning stage (NPS6D200). The data quantify absolute yaw, roll, and pitch origin angles of reference mirrors used for interferometric displacement measurement.

Angular offsets were determined using a calibrated optical polygon and a cuboid mirror artifact in combination with autocollimator measurements under operational mounting conditions. Yaw (θ) angles were referenced to the optical polygon, while roll (φ) and pitch angles were derived from surface slope measurements obtained with a range-resolved interferometer (RRI)*. Traceability to the SI unit of plane angle was established through the calibrated angular artifacts.

The dataset includes raw angular measurements, processed angular origin offsets for each reference mirror, repeatability statistics, and metadata describing measurement configurations and correction procedures. These data enable analysis of systematic cosine and Abbe error contributions in multi-axis nanopositioning systems and support the development and validation of geometric error models, calibration methods, and coordinate reconstruction algorithms in precision metrology.

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*Project OpenRRI is available at https://openrri.org