https://refodat.de/receive/refodat_mods_00000070https://refodat.de/servlets/MCRZipServlet/refodat_derivate_00000062https://refodat.de/rsc/thumbnail/refodat_mods_00000070.png In-situ referencing of the absolute angles of mirrors origin in a 6-DOF nanopositioning stage. Brasil, Davi Anders aut Author 0009-0000-2147-0691 Brasil Davi Anders Hesse, Steffen aut Author Hesse Steffen Institut für Mikroelektronik- und Mechatronik-Systeme Katzschmann, Michael aut Author Katzschmann Michael Institut für Mikroelektronik- und Mechatronik-Systeme Herzog, Ludwig aut Author 1246272318 Herzog Ludwig Fröhlich, Thomas aut Author 120775603 Fröhlich Thomas Kissinger, Thomas aut Author 1241256756 Kissinger Thomas 2026-01-20 2026-01-20 2026-01-15 10.3390/app14166972 NPS6D200—A Long Range Nanopositioning Stage with 6D Closed Loop Control https://openrri.org OpenRRI en 1,9 GB This dataset contains in-situ angular measurements of reference mirrors in a six-degree-of-freedom (6-DOF) nanopositioning stage (NPS6D200). The data quantify absolute yaw, roll, and pitch origin angles of reference mirrors used for interferometric displacement measurement. Angular offsets were determined using a calibrated optical polygon and a cuboid mirror artifact in combination with autocollimator measurements under operational mounting conditions. Yaw (θ) angles were referenced to the optical polygon, while roll (φ) and pitch angles were derived from surface slope measurements obtained with a range-resolved interferometer (RRI)*. Traceability to the SI unit of plane angle was established through the calibrated angular artifacts. The dataset includes raw angular measurements, processed angular origin offsets for each reference mirror, repeatability statistics, and metadata describing measurement configurations and correction procedures. These data enable analysis of systematic cosine and Abbe error contributions in multi-axis nanopositioning systems and support the development and validation of geometric error models, calibration methods, and coordinate reconstruction algorithms in precision metrology. ===================================================== *Project OpenRRI is available at https://openrri.org Table of contents (the variables of the files are described in the metadata.json file) figs: pictures describing the measurement process and results. ROLL φ : database of measurements for roll detection. YAW θ : database of measurements for yaw detection. cuboidMeasU.m: script that calculates the roll angle for the mirror U. cuboidMeasV.m: script that calculates the roll angle for the mirror V. cuboidMeasW.m: script that calculates the roll angle for the mirror W. YawAngles.m: script that calculates the yaw angle for the mirrors V and W. The scripts were written using Matlab in version R2022a. nanopositioning reference cosine error origin reference angles autocollimator measurements optical metrology Ilmenau 620 10.71758/refodat.70 refodat_mods_00000070https://refodat.de/receive/refodat_mods_00000070