FIB-SEM nano tomography (3D BSE and EDX) on hydrated CEM I utilising the lift-out-method

Institute-internal dataset path: "./Mitarbeiter/Florian Kleiner/FIB-Data/2025_01_07 FIB-Zylinder2025_01_07 FIB-Zylinder"

The SEM was a Helios G4 UX by Thermo Fisher Scientific. The software used to run the experiment and which created the project dataset is Auto Slice & View 4.1 by Thermo Fisher Scientific. The specimen was preparated within the bulk material and cut into 10 nm tick slices. The EDX analysis was done every 10th BSE slice to reduce charging using a "XMax^N 80" with a polymer window and a windowless "Ultim Extreme".

The BSE-dataset can be found in "SEM-FIB-BSE-Dataset.7z" in ,/Images/SEM Image/ The image quality is good between slices 762 and 2140. The slices have a resolution of 1931 x 2732 px @ 14.4531 nm/px.

The file "ProjectData.dat" within the "SEM-FIB-BSE-Dataset.7z " archive is a XML file and contains metadata for the whole project and each slice. Each raw TIFF within the project also contains a set of metadata created by the SEM acquisiton software at the end of the TIFF datastream.

The archive "SEM-FIB-EDX-oip-raw-data.7z" contains the raw EDX datasets as a Oxford Instruments AZtec 4.3 project file (*.oip). These are vendor-specific files, for which the software Aztec is required. The EDX slices were also exported as a TIFF stack (1024 x 704 px @ 44.90 nm/px, 16 bit) for each evaluated element (Al, C, Ca, Cl, Fe, K, Mg, Na, O, Pt, S, Si) and are available in "SEM-FIB-EDX-tiff-stacks.7z". This archive also contains the electron images taken during the EDX process, which show significant charging artifacts. Furthermore, denoised TIFF variants of the element slices at 8 bit are available in the respective element folders.