Thermal Analysis of a Coil Assembly in a Nanopositioning Drive System via Reduced-Complexity CFD Modeling

This dataset contains the measurement data to the corresponding open acces paper "Thermal Analysis of a Coil Assembly in a Nanopositioning Drive System via Reduced-Complexity CFD Modeling". The paper presents the development and verification of a reduced model CFD simulation for a nanopositionings drive system. The system, referred to as NPS6D200, provides Ø200 mm planar and 25 mm vertical travel range while maintaining direct force transfer to the moving platform (or slider) in all DOF. Its linear dive system, composing of three acuator systems, develops heat which negatively influences the positioning systems accuracy. The corresponding data contains thermal measurements on different parts of the drive system such as the coils and the cooling channels as well as corresponding mass flow data and power settings for verification of the developed simulation models.