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NPS6D100—A 6D Nanopositioning System with Sub-10 nm Performance in a Ø100 mm × 10 mm Workspace
This dataset contains the raw and processed position, RMS-servo error and Frequency-Response-Function (FRF) measurement data to the corresponding open-access paper "NPS6D100—A 6D Nanopositioning System with Sub-10 nm Performance in a Ø100 mm × 10 mm Workspace". The paper presents the development of a…