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In-Situ Topography Characterization of Mirrors in a Six-Degree-of-Freedom Nanopositioning System
This dataset provides high-resolution surface topography maps of the four reference mirrors in the NPS6D200 six-degree-of-freedom (6-DOF) nanopositioning system, measured under real operating conditions. The data were acquired using a fully in-situ method based on angular measurements from three external…