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Investigation of long-term distance measurement repeatability in a large-range nanopositioning machine combined with a laser focus sensor

This dataset consists of the measurement repeatability of a nanopositioning machine equipped with a laser focus sensor (LFS). The highlights of the results are:

  1. The combination of nanopositioning machine and laser focus sensor allows for dimensional measurements close to sub-10 nm performance over a large range.
  2. Laser focus sensor is a potential sensor to lateral measurements using high contrast reflection artifact with have the advantage of point measurement principle with can fulfill the Abbe principle and integration into real-time feedback loops for height control.
  3. Estimation of a design without a metrology frame influence results in a considerable nanometer range.

The system operates within a volume of Ø200 mm x 25 mm and implements 6-DOF positioning control based on direct magnetic drives, differential laser interferometers and an autocollimator. The integrated LFS makes it suitable for a wide range of applications. Experimental evaluations showed remarkable repeatability results in large-range distance measurements, with standard deviation values below 15 nm over a range of 155 mm.

This work was presented at the 20th International Conference on Precision Engineering (ICPE2024) in Sendai on 26 October 2024.
https://web.tohoku.ac.jp/nanometrology/icpe2024/indexHomepage.html 

These experiments involved the measurement of positions on a cross grid artifact by unconventional use of the LFS.

http://dx.doi.org/10.13140/RG.2.2.15730.68808

Corrections for environmental conditions and sample temperature variations have been applied to the actual results.

Table of contents (the variables of the files are described in the metadata.json file)

  • centers.mat: database of the centre position of the squares (X, Y and Z) detected for the farther ones in mm.
  • temperature.mat: database of the temperature during the measurement process in °C.
  • barometer.csv: database of air pressure and temperature measured by a barometer in the laboratory.
  • main.m: main script that calls the functions in the correct order.
  • rawMeasurements.m: script that calculates the position of the squares witout correction.
  • correctedMeasurements.m: script that calculates the distance between the squares in X and Y with expansions (glass artifact and granite estimation) corrections and the standard deviation.
  • EdlenCorrection.m: script function that returns the factor obtained to multiply measurements according to the refractive index correction and artifact thermal expansion correction.
  • ICPE2024_GS10-08_Davi_Anders_BrasilV1.0.pdf: presentation at the ICPE. 

The scripts were written in Matlab running in the R2022a version.

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Metadata

published:
28.04.2025
DOI:
10.71758/refodat.36
Language:
English
Extent:
4,96 MB
Keywords:
nanopositioning in large travel range; nanometrology; multi-coordinate direct drive; laser focus sensor for lateral measurements
Format:
.m (Matlab)
.mat (Matlab)
.json (JavaScript Object Notation (JSON))
.csv (Comma-Seperated Values)
.pdf (Adobe Portable Document Format)
SDNB:
620 Engineering & allied operations
Institution:
TU Ilmenau
Geographic:
IlmenauGND
Access permissions:
No restrictions
is published in:
20th International Conference on Precision Engineering
references:
Unconventional, lateral measurements with laser focus sensor for nanopositioning stages(Audiovisual)
DOI: 10.13140/RG.2.2.15730.68808
references:
NPS6D200—A Long Range Nanopositioning Stage with 6D Closed Loop Control
DOI: 10.3390/app14166972

Funding

Name of Funder:
Deutsche Forschungsgemeinschaft
Funder ID:
ISNI: 0000 0001 2096 9829
Grant Title:
GRK 2182: Tip- and Laser-Based 3D­ Nanofabrication in Extended Macroscopic Working Areas
Grant Number:
Project No. 274711337
Grant URI:
https://gepris.dfg.de/gepris/projekt/274711337

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