NPS6D100—A 6D Nanopositioning System with Sub-10 nm Performance in a Ø100 mm × 10 mm Workspace

This dataset contains the raw and processed position, RMS-servo error and Frequency-Response-Function (FRF) measurement data to the corresponding open-access paper "NPS6D100—A 6D Nanopositioning System with Sub-10 nm Performance in a Ø100 mm × 10 mm Workspace". The paper presents the development of a compact nanopositioning stage with long-range capabilities and six degrees of freedom (DOF) closed-loop control. The system, referred to as NPS6D100, provides Ø100 mm planar and 10 mm vertical travel range while maintaining direct force transfer to the moving platform (or slider) in all DOF. The mechanical structure, drive architecture, guiding, and measurement subsystems are described in detail, along with experimental results that confirm sub-10 nm servo errors under constant setpoint operation and in synchronized multi-axis motion scenarios. The corresponding data of the experimental plant identification and performance evaluation is contained in this dataset. With its scalable and low-disturbance design, the NPS6D100 is well suited as a nanopositioning platform for sub-10 nm applications in nanoscience and precision metrology.