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Datensatz
CC BY 4.0
2025-04-28
Investigation of distance measurement reproducibility for a long-range nanopositioning machine combined with a laser focus…
This dataset consists of the measurement reproducibility of a nanopositioning machine equipped with a laser focus sensor (LFS). The highlights of the results are: high precision positioning repeatability using planar direct drive and pneumatic lift units, the combination of nanopositioning machine and…