3 documents found
In-situ referencing of the absolute angles of mirrors origin in a 6-DOF nanopositioning stage.
This dataset contains in-situ angular measurements of reference mirrors in a six-degree-of-freedom (6-DOF) nanopositioning stage (NPS6D200). The data quantify absolute yaw, roll, and pitch origin angles of reference mirrors used for interferometric displacement measurement. Angular offsets were determined…
NPS6D100—A 6D Nanopositioning System with Sub-10 nm Performance in a Ø100 mm × 10 mm Workspace
This dataset contains the raw and processed position, RMS-servo error and Frequency-Response-Function (FRF) measurement data to the corresponding open-access paper "NPS6D100—A 6D Nanopositioning System with Sub-10 nm Performance in a Ø100 mm × 10 mm Workspace". The paper presents the development of a…
Investigation of long-term distance measurement repeatability in a large-range nanopositioning machine combined with a laser…
This dataset consists of the measurement repeatability of a nanopositioning machine equipped with a laser focus sensor (LFS). The highlights of the results are: The combination of nanopositioning machine and laser focus sensor allows for dimensional measurements close to sub-10 nm performance over a…