3 documents found
Thermal Analysis of a Coil Assembly in a Nanopositioning Drive System via Reduced-Complexity CFD Modeling
This dataset contains the measurement data to the corresponding open acces paper "Thermal Analysis of a Coil Assembly in a Nanopositioning Drive System via Reduced-Complexity CFD Modeling". The paper presents the development and verification of a reduced model CFD simulation for a nanopositionings drive…
NPS6D100—A 6D Nanopositioning System with Sub-10 nm Performance in a Ø100 mm × 10 mm Workspace
This dataset contains the raw and processed position, RMS-servo error and Frequency-Response-Function (FRF) measurement data to the corresponding open-access paper "NPS6D100—A 6D Nanopositioning System with Sub-10 nm Performance in a Ø100 mm × 10 mm Workspace". The paper presents the development of a…
Investigation of long-term distance measurement repeatability in a large-range nanopositioning machine combined with a laser…
This dataset consists of the measurement repeatability of a nanopositioning machine equipped with a laser focus sensor (LFS). The highlights of the results are: The combination of nanopositioning machine and laser focus sensor allows for dimensional measurements close to sub-10 nm performance over a…