2 documents found
NPS6D100—A 6D Nanopositioning System with Sub-10 nm Performance in a Ø100 mm × 10 mm Workspace
This dataset contains the raw and processed position, RMS-servo error and Frequency-Response-Function (FRF) measurement data to the corresponding open-access paper "NPS6D100—A 6D Nanopositioning System with Sub-10 nm Performance in a Ø100 mm × 10 mm Workspace". The paper presents the development of a…
Investigation of distance measurement reproducibility for a long-range nanopositioning machine combined with a laser focus…
This dataset consists of the measurement reproducibility of a nanopositioning machine equipped with a laser focus sensor (LFS). The highlights of the results are: high precision positioning repeatability using planar direct drive and pneumatic lift units, the combination of nanopositioning machine and…