2 documents found
In-situ referencing of the absolute angles of mirrors origin in a 6-DOF nanopositioning stage.
This dataset contains in-situ angular measurements of reference mirrors in a six-degree-of-freedom (6-DOF) nanopositioning stage (NPS6D200). The data quantify absolute yaw, roll, and pitch origin angles of reference mirrors used for interferometric displacement measurement. Angular offsets were determined…
Investigation of long-term distance measurement repeatability in a large-range nanopositioning machine combined with a laser…
This dataset consists of the measurement repeatability of a nanopositioning machine equipped with a laser focus sensor (LFS). The highlights of the results are: The combination of nanopositioning machine and laser focus sensor allows for dimensional measurements close to sub-10 nm performance over a…