Investigation of distance measurement reproducibility for a long-range nanopositioning machine combined with a laser focus sensor

These experiments involved the measurement of positions on a cross grid artifact by unconventional use of the LFS.

http://dx.doi.org/10.13140/RG.2.2.15730.68808

Corrections for environmental conditions and sample temperature variations have been applied to the actual results.

Table of contents (the variables of the files are described in the metadata.json file)

• centers.mat: database of the centre position of the squares (X, Y and Z) detected for the farther ones in mm.
• temperature.mat: database of the temperature during the measurement process in °C.
• barometer.csv: database of air pressure and temperature measured by a barometer in the laboratory.
• main.m: main script that calls the functions in the correct order.
• rawMeasurements.m: script that calculates the position of the squares witout correction.
• correctedMeasurements.m: script that calculates the distance between the squares in X and Y with expansions (glass artifact and granite estimation) corrections and the standard deviation.
• EdlenCorrection.m: script function that returns the factor obtained to multiply measurements according to the refractive index correction and artifact thermal expansion correction.
• ICPE2024_GS10-08_Davi_Anders_BrasilV1.0.pdf: presentation at the ICPE. 

The scripts were written in Matlab running in the R2022a version.